Sumitomo Cryogenics

Sumitomo Cryogenics is a leading manufacturer of cryopumps, water traps and in-vacuum robots. Established as a global trusted partner in CVD, PVD and Etch applications.

Our Sicera series of cryopumps are designed to meet the needs of high vacuum PVD processes. As we all strive to reach net-zero and fabs look to reduce energy consumption, Sicera offers up to (11) cryopumps running from (1) compressor.

Water-traps are utilised to remove water when the use of cryopumps is limited by process gasses. They are installed either in-line between the gate valve and turbo pump, or directly into the chamber with a cold panel.

Our Persimmon in-vacuum robots are a key component in a range of tools, used to transport wafers through process modules. The unique design and footprint of our robot allows for industry leading pick and placement speed and precision.

All our products are backed by a global service infrastructure.